Mass Spectrometry Study of Reactive Species in a Microhollow Cathode Discharge in He<sup>+</sup>H<sub>2</sub>O Mixtures

Authors

  • Yuya Katada Hiroshima University
  • Singo Ikeno Hiroshima University
  • Shota Murakami Hiroshima University
  • Shinichi Namba Hiroshima University
  • Ken Kakiyama Hiroshima University
  • Kazutoshi Takenoshita Samsung Electronics Co. Ltd.
  • Hideo Nojima Samsung Electronics Co. Ltd.

DOI:

https://doi.org/10.4186/ej.2013.17.5.29

Keywords:

microhollow cathode discharge, reactive species, mass spectrometry

Abstract

Reactive species created by a microhollow cathode discharge (MHCD) in He+H2O mixtures were investigated at 160 Torr using the molecular beam mass spectrometry. Ion currents of He+, HeH+, O+, OH+, H+(H2O), and H+(H2O)2 were measured as functions of H2O relative concentration (0.24 - 14%) and discharge current (5 - 15 mA). When the concentration exceeds 6%, most of the ions were decreased, but H+(H2O)2 (cluster ion) significantly increased at discharge current of 5 mA, whose ion current was very low compared with those of other ions. With increasing the discharge current, the cluster ion showed a sharp decrease, while the other ions were almost constant. These features were reasonably explained by the increase of the gas temperature and the plasma rarefaction due to the Joule heating of the working gas.

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Author Biographies

Yuya Katada

Graduate School of Engineering, Hiroshima University, Higashihiroshima, Hiroshima 739-8527, Japan

Singo Ikeno

Graduate School of Engineering, Hiroshima University, Higashihiroshima, Hiroshima 739-8527, Japan

Shota Murakami

Graduate School of Engineering, Hiroshima University, Higashihiroshima, Hiroshima 739-8527, Japan

Shinichi Namba

Graduate School of Engineering, Hiroshima University, Higashihiroshima, Hiroshima 739-8527, Japan

Ken Kakiyama

Graduate School of Engineering, Hiroshima University, Higashihiroshima, Hiroshima 739-8527, Japan

Kazutoshi Takenoshita

Digital Appliances R&G Center, Samsung Electronics Co., Ltd., Suwon, Gyeonggi 443-742, Korea

Hideo Nojima

Digital Appliances R&G Center, Samsung Electronics Co., Ltd., Suwon, Gyeonggi 443-742, Korea

Published

Vol 17 No 5, Dec 31, 2013

How to Cite

[1]
Y. Katada, “Mass Spectrometry Study of Reactive Species in a Microhollow Cathode Discharge in He<sup>+</sup>H<sub>2</sub&gt;O Mixtures”, Eng. J., vol. 17, no. 5, pp. 29-34, Dec. 2013.