Substrate Temperature Effect on Optical property of ZnO Thin Films

Authors

  • Achour Rahal University of El-oued
  • Said Benramache University of Biskra
  • Boubaker Benhaoua University of El-oued

DOI:

https://doi.org/10.4186/ej.2014.18.2.81

Keywords:

ZnO, thin films, TCO, ultrasonic spray technique

Abstract

The transparent conducting ZnO thin films were deposited on glass substrate by ultrasonic spray technique. The optical, electrical and structural properties of the ZnO thin films were studied as a function of the substrate temperatures in the range of 300 to 400°C. The as deposited film exhibit an hexagonal structure wurtzite and (101) oriented. The value of grain size = 28 nm is measured of ZnO film at 350°C. All the films having high transparency in the visible region, the band gap energy decreased from 3.44 to 3.29 eV with increasing in the substrate temperatures from 300 to 400°C. The the Urbach energy decreased reaching to minimum at 350°C; indicating to decrease of the defects. The electrical resistivity of the films for 350°C is 50 Ω.cm. A systematic study on the influence of the substrate temperatures on the properties of ZnO thin films deposited by ultrasonic spray has been reported.

Downloads

Download data is not yet available.

Author Biographies

Achour Rahal

VTRS Laboratory, Institute of Technology, University of El-oued, 39000, Algeria

Said Benramache

Material Sciences Department, Faculty of Science, University of Biskra, 07000, Algeria

Boubaker Benhaoua

VTRS Laboratory, Institute of Technology, University of El-oued, 39000, Algeria

Published

Vol 18 No 2, Apr 18, 2014

How to Cite

[1]
A. Rahal, S. Benramache, and B. Benhaoua, “Substrate Temperature Effect on Optical property of ZnO Thin Films”, Eng. J., vol. 18, no. 2, pp. 81-88, Apr. 2014.